走査型プローブ顕微鏡の探針移動制御方法

Method for controlling travel in probe in scanning probe microscope

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for controlling the travel of a probe in a scanning probe microscope for easily controlling the scanning travel of the probe on a sample surface, while maintaining high measurement precision, when measuring a part, or the like, having an inclination when measuring irregularities on the sample surface. <P>SOLUTION: The method for controlling the travel of the probe in the scanning probe microscope comprises respective slight movement mechanisms 23, 29, 30 of X, Y, Z for relatively changing the positions of the probe and the sample, such as a cantilever 21 having the probe 20 that faces the sample 12, and an optical lever type optical detector for measuring atomic force, or the like generated between the probe and the sample, when the probe scans the surface of the sample. The method is applied to the scanning type probe microscope for measuring the sample surface by scanning the sample surface by the slight movement mechanism; while physical quantities are maintained constant by a measurement section, and has a feature for changing the approach direction of the probe, when the traveling direction for bringing the probe closer to the sample surface differs from a reaction direction, when the probe comes into contact with the sample surface at least by a set value. <P>COPYRIGHT: (C)2005,JPO&NCIPI
【課題】 試料表面の凹凸の測定で勾配を有する部分等を測定するときに高い測定精度を保ち、試料表面上の探針の走査移動を簡単な制御で行うことができる走査型プローブ顕微鏡の探針移動制御方法を提供する。 【解決手段】 この走査型プローブ顕微鏡の探針移動制御方法は、試料12に対向する探針20を有するカンチレバー21、探針が試料の表面を走査するとき探針と試料の間で生じる原子間力等を測定する光てこ式光学検出装置等、探針と試料の位置を相対的に変化させX,Y,Zの各微動機構23,29,30を備え、測定部で物理量を一定に保ちながら微動機構により試料表面を走査して試料表面を測定する走査型プローブ顕微鏡に適用され、探針を試料表面に接近させる移動方向と、探針が試料表面に接触したときの反力方向とが設定値以上に異なるとき、探針の接近方向を変更する特徴を有する。 【選択図】 図7

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    JP-2008102138-AMay 01, 2008Veeco Instruments Inc, ビーコ インストルメンツ インコーポレイテッド走査型プローブ顕微鏡を用いたサンプル走査方法および装置
    JP-2008196983-AAugust 28, 2008Mitsutoyo Corp, 株式会社ミツトヨCopying control method for contact type probe, and contact type measuring machine